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Flow Module Part No: 5018238
I/F IRAS BASE #01 TU817A078G64 1
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Greene Tweed Part No: 9242-SC639
TEL Tokyo Electron 300mm IFBS PIR Wafer Rinse Station Clean Track Lithius Spare Flow Module Part No: 5018238TEL Tokyo Electron 300mm IFBS PIR Wafer Rinse Station Clean Track Lithius Spare Model No: IFBS Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System This item is untested surplus and is being sold as is. The physical condition is fair, but there are signs of previous use and handling. Sale Details Item Condition: Sold As Is for Parts or Repair Estimated Packed Shipping Dimensions: L x W x H = 39"x27"x30" @ 200 lbs; Requires Freight
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