Aera TC FC-D980C Mass Flow Controller HBR 183.23 SCCM w/ CA-98D9-Z Adapter Used Part No: 16-143143 D01

Part No: 16-143143 D01

Part No: 3SU38EC

Part No: Insulator Ring B2 DRM Model No:

Part No: 61754

Inventory # 15195

Aera TC FC-D980C Mass Flow Controller HBR 183.23 SCCM w/ CA-98D9-Z Adapter Used Part No: 16-143143 D01Aera TC FC D980C Mass Flow Controller HBR 183. 23 SCCM w CA 98D9 Z Adapter used working Inventory # AA 3201 This Aera TC FC D980C mass flow controller with adapter is used working surplus. The physical condition is good, but there are some signs of previous use and handling. This item will be removed from the main body of a Hitachi M 511E system. Specifications MFC Part No: TC FC D980C Adapter Part No: CA 98D9 Z Gas: HBR Range: 183. 23 SCCM Fitting: